Materials Problems and Approaches for TEM and TEM/STEM Analyses - Sample Preparation Topic for Transmission Electron Microscopy - page 79

Table 4.4 Sample thicknesses required for structural and physical characterization, depending on the TEM technique

Observation mode CTEM TEM/STEM and STEM

Microdiff.
Nanodiff.
(nm)

BF/DF
(nm)

SAED
(nm)

HRTEM
(nm)

CBED
(nm)

LACBED
(nm)

HAADF
(nm)

EELS
(nm) Analysis type WB (nm) EDS (nm)

Topography <50

Structure <50 <50 ≥ 50 ≥ 50 <50

≥ 50 ≤ 50 ≥ 50 ≥ 50

Structural defects <50 <50 <50 <50

≤ ≤ ≥ ≥

Crystallography 50 50 50 50

Chemical
composition

≤ 50 ≥ 50 <50

Chemical bonds <50

Properties ≥ 50 <50 ≥ 50 ≥ 100 <50