Biomedical Engineering Reference
In-Depth Information
33. Ehrfeld, W., Bley, P., Gotz, F., Hagmann, P., Maner, A., Mohr, J., Moser, H.O.,
Munchmeyer, D., Schelb, W., Schmidt, D., and Becker, E.W. 1987. Fabrication
of microstructures using the LIGA process.
Proc. IEEE
Micro Robots and
Teleoperators Workshop, Hyannis, MA, Nov.
34. Menz, W., Bacher, W., Harmening, M., and Michel, A. 1991. The LIGA technique:
A novel concept for microstructures and the combination with Si-technologies
by injection molding. IEEE Workshop on Micro Electro Mechanical Systems,
MEMS 91
, p. 69.
35. Unpublished internal hot embossing data from the MEMS and Nanotechnology
Exchange, CNRI, Reston, Virginia.
36. Chu, P.B., Chen, J.T., Yeh, R., Lin, G., Hunag, C.P., Warneke, B.A., and Pister,
K.S.J. 1997. Controlled pulse-etching with xenon difluoride.
Proc. Inter. Conf.
Solid-State Sensors and Actuators, Transducers
97, June, p. 665.
37. Kovacs, G.T.A. 1998.
Micromachined Transducers Sourcebook
. New York:
McGraw-Hill.
38. Elwenspoek, M., and Wiegerink, R. 2001.
Mechanical Microsensors
. Berlin,
Germany: Springer.
39. H.A. Haus and J.R. Melcher. 1989.
Electromagnetic Fields and Energy
. Prentice-Hall.
40. Kahn, H., Benard, W., Huff, M., and Heuer, A. 1996. Titanium-nickel shape-memory
thin-film actuators for micromachined valves.
Materials Research Society Symposium
Proceedings
, 444, presented at Fall MRS meeting, December, Boston, MA.
41. Benard, W. and Huff, M. 1997. Thin-film titanium-nickel shape memory alloy
microfluidic devices. Spring Electrochemical Society Meeting, June, Montreal,
Canada.
42. Benard, W., Kahn, H., Heuer, A., Huff, M. 1997. A titanium-nickel shape-
memory alloy actuated micropump. IEEE International Conference on Solid-
State Sensors and Actuators, Transducers 97, Chicago, IL, June.
43. Senturia, S.D. 2001.
Microsystem Design
, p. 720. New York: Springer.
44. See: http://www.coventor.com/.
45. Mulhern, G.T., Soane, D.S., and Howe, R.T. 1993. Supercritical carbon dioxide
drying of microstructures.
Proc. 7th Int. Conf. Solid-State Sensors and Actuators,
Transducers 93
, Yokohama, Japan, p. 296, June.
46. Ashurst, R., Carraro, C., Chinn, J.D., Fuentes, V., Kobrin, B., Maboudian, R.,
Nowak, R., Yi, R. 2004. Improved vapor-phase deposition technique for anti-
stiction monolayers.
Proceedings of SPIE: The International Society for Optical
Engineering
5342(1), 204-211.
47. Voskerician, G., et al. 2003. Biocompatibility and biofouling of MEMS drug
delivery devices.
Biomaterials
24a: 959-1967.
48. Greco, R.S. 1994.
Implantation Biology
. CRC Press.
49. Joseph, H., Swafford, B., Terry, S. MEMS in the medical world.
Sensors Magazine
.
See http://archives.sensorsmag.com/articles/0497/medical/.
50. Panescu, D. 2006. MEMS in medicine and biology.
IEEE Engineering in Medicine
and Biology Magazine
, September/October.
51. Brysek, J., Petersen, K., Mallon, J.R., Christel, L., and Pourahmadi, F. 1990.
Silicon Sensors and Microstructures
. Fremont, CA: NovaSensor Company Books.
52. Petersen, K., Barth, P., Poydock, J., Brown, J., Mallon, J., and Brysek, J. 1988.
Silicon fusion bonding for pressure sensors. IEEE Solid-State Sensor and
Actuator Workshop, Hilton Head South Carolina, June 6-9, p. 144.
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