Biomedical Engineering Reference
In-Depth Information
1024 sites and 64 data channels on 400µm centers
FIGuRE 3.36 (See color insert.)
Photograph of MEMS microelectrode array for visual prosthesis.
as the ability to recognize levels of brightness, shades of colors, and geo-
metrical shapes [77]. However, presently these devices are far from having a
performance level remotely equivalent to the replacement of a living eye. It is
important to note that these types of electrode array architectures are likely
to be well suited for implanting in other sensory or motor regions of the
cerebral cortex for other medical conditions, including deafness, epilepsy,
paralysis, and Parkinson's disease [76].
Future Trends
The future of MEMS includes higher levels of integration, more func-
tionality for each device, and smaller dimensional scales. As fabrication
capabilities continue to improve, it is expected that it will be possible in the
future to easily integrate a multiplicity of sensor and actuator types on a
single slab of silicon with state-of-the-art electronics. Moreover, the integra-
tion of other types of technologies, such as photonics and nanotechnology,
will become increasingly prevalent. This will enable enormous amounts
of functionality to be squeezed into a very tiny amount of space and at a
very low relative cost. The size scale of many MEMS devices is continu-
ously being reduced by advancements in fabrication technologies. This fact,
coupled with the benefits derived from making things smaller as a result of
the scaling laws (as well as economic forces) will provide a relentless driv-
ing force for continuous size reductions. The current trend toward reducing
the length of hospital stays is putting a greater emphasis on outpatient and
home care. Many of the monitoring products originally developed for hos-
pitals are being made less expensive and less complicated for use in home
care environments. The market for lower-cost MEMS devices is accordingly
expanding.
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