Biomedical Engineering Reference
In-Depth Information
3
Medical Applications of Micro-Electro-
Mechanical
Systems (MEMS) Technology
Michael A. Huff
CONTENTS
Abstract ................................................................................................................... 30
What Is MEMS Technology? ................................................................................ 30
The Advantages Offered by MEMS Technology for Medical
Applications ...................................................................................................... 33
How Are MEMS Made? ....................................................................................... 34
Bulk Micromachining ...................................................................................... 34
Surface Micromachining ................................................................................. 41
Wafer Bonding .................................................................................................. 43
High-Aspect-Ratio MEMS Fabrication Technologies ................................. 46
Deep Reactive Ion Etching of Silicon ........................................................ 46
Deep Reactive Ion Etching of Glass .......................................................... 48
LIGA .............................................................................................................. 48
Hot Embossing ............................................................................................. 50
Other Micromachining Technologies ....................................................... 51
XeF
2
Dry Phase Etching .............................................................................. 52
Electro-Discharge Micromachining .......................................................... 52
Laser Micromachining ................................................................................ 53
Focused Ion Beam Micromachining ......................................................... 53
MEMS Process Sequence Development and Process Integration ............. 54
MEMS Device Technologies ................................................................................ 54
Microsensor Technology.................................................................................. 54
Microactuator Technology .............................................................................. 57
MEMS Design Tools .............................................................................................. 59
Backend MEMS Processes: Device Release and Die Separation .................... 60
The Materials Used in MEMS ............................................................................. 61
Biocompatibility of MEMS Materials ................................................................. 62
Applications of MEMS in Medicine ................................................................... 64
MEMS Pressure Sensors .................................................................................. 65
Integrated MEMS Pressure Sensor for Disposable Medical
Applications ....................................................................................................67
Extremely Small-Sized Catheter-Tip Disposable MEMS Blood
Pressure Sensor ................................................................................................. 71
29
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