Nanotechnology’s Wonder Material: Synthesis of Carbon Nanotubes - Hierarchical Nanostructures for Energy Devices - page 31

Figure 3.2 Common types of CVD systems. (A) Thermal CVD (hot-wall) equipped with an in situ growth monitoring system. Reprinted
with permission from ref. 47. Copyright 2011, AIP Publishing LLC. (B) PECVD setup. Reprinted with permission from ref. 21.
Copyright 2002, American Institute of Physics. (C) Remote PECVD. Reprinted with permission from ref. 23. Copyright 2004
American Chemical Society.