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shown in Fig. 6.2b and acquired from the implanted and annealed
samples, the shift from carbon to carbide occurred at 11 nm (series)
furnishing evidence of the formation of an implanted region [24].
Figure 6.7
AFM micrographs of the DLC films prepared by PIII-D at
FC
:FAr ratios of (a) 0.6 and (b) 1.2. Reprinted from
Ref. [23], Copyright 2002, with permission from Elsevier.
H
2
2
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