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as breast implant tissue integration [17]. Nano-topographies can
be produced on the surface of titanium alloys by PIII&D. A typical
PIII&D system in the Plasma Laboratory of City University of Hong
Kong is schematically illustrated in Fig. 6.1. The system is composed
of a stainless steel cylindrical chamber 1000 mm in height and 750
mm in diameter with a large rectangular front door, radio frequency
(RF) inductively coupled plasma source, and 100 kV, 300 A solid-
state power modulator. The titanium alloy samples are placed on a
sample stage connected to the power modulator in the chamber with
a base vacuum of 1
6
Torr. After a gas such as nitrogen or oxygen
is bled into the chamber through two individual flow controls and
inlets on top of the chamber, the specimens are pulse biased to a high
negative potential relative to the chamber wall and ions generated
in the plasma are accelerated across the sheath formed around the
specimen and implanted into the specimens. Because of the absence
of ion transport optics and mass selection, PIII can provide a high
ion flux. By using different plasma sources, biomimetic surface
structures can be produced on titanium alloys.
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10
Figure 6.1
 Schematic diagram of PIII system in City University of Hong
Kong [18].
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