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process. However, as new applications of silicon nanotips such as
in optoelectronics, microfluidics, and biosensors have emerged, the
forming process of a reliable silicon nanotip having features of both
simple and reproducible is of great interest. Thus, three different
methods of which features are simple and reproducible have been
explained. In addition, one of the techniques has been successfully
applied to remove the ghost image in the micro sun sensor.
Acknowledgements
The research was carried out at the Jet Propulsion Laboratory,
California Institute of Technology, under a contract with the National
Aeronautics and Space Administration (NASA), USA. The author
would sincerely like to thank K. Yee, H. Manohara, C. Liebe, and S.
Mobassor for their help on micro sun sensor and plasma etching
processes.
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