Chemistry Reference
In-Depth Information
Chapter 3
Plasma-Processed Biomimetic Nano-
and Micro-Structures
Choonsup Lee
Jet Propulsion Laboratory, California Institute of Technology, 4800 Oak Grove Drive,
Pasadena, CA 9110, USA
Choonsup.Lee@JPL.NASA.gov
The sun sensor has been used to determine the orientation of
the sun in all the satellites in the space and rovers on the Mars.
However, the conventional sun sensors are too bulky for their use
in the miniaturised satellites such as nanosatellite due to the budget
restriction on mass or size. Thus, the sun sensor has to be also
miniaturised in order to meet the mass or size requirement. During
the development of micro sun sensor, there was a ghost image
problem caused by the internal reflection within the packaged micro
sun sensor. This problem was solved by utilising silicon nanotips as
an antireflection surface. Thus, this chapter will present different
methods of forming silicon nanotips using plasma etching process
and how the silicon nanotips solved the ghost image issue as an
example of biomimetics after reviewing the micro sun sensors.
 
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