Biomedical Engineering Reference
In-Depth Information
Fig. 7.12.
Calculated red shift of the reflectance dip vs. pore diameter for layers of
fixed porosities (70 and 80%) and various thicknesses
L
of the coating on the pore
walls
Fig. 7.13.
Three low-porosity layers and two high-porosity layers etched in silicon
using a periodic current density. Note the continuity of the pores and the sharpness
of the interfaces between high and low porosity layers. The period is approximately
1
ยต
m
mesoporous silicon microcavity with pore diameters from 10 to 50 nm was
fabricated on a p+ wafer (0.01 ohm-cm) with 15% HF in ethanol. The macro-
porous silicon microcavity with pore diameters from 80 to 150 nm was etched
in an n+ wafer (0.01 ohm-cm) with 5.5% HF in DI water [10].
