Biomedical Engineering Reference
In-Depth Information
Fig. 7.7.
The dissolution of silicon when holes are injected from the substrate toward
the Si/electrolyte interface. On the
left
, porous silicon formation takes place when
the hole flux is relatively small. On the
right
, electropolishing takes place when the
hole flux is large
Fig. 7.8.
Dependence of the porosity of the current density for highly-doped
n
-type
silicon
