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20 µm
10 µm
(a)
(b)
10 µm
10 µm
(c)
(d)
10 µm
10 µm
(e)
(f )
FIGURE 8.71 SEM photograph of silicon oxide particles coated by magnetron sputter-
ing. (a and b): Uncoated silicon oxide particles, (c and d) Cu-coated silicon oxide particles,
(e) Ti-coated silicon oxide particles, (f) Al-coated silicon oxide particles. (From Shyjumon, I.
et al., Thin Solid Films , 500, 41, 2006.)
copper films amounting to about 1.5 μm. The coated particles show a rough and
cauliflower-like shape, which makes them attractive, e.g., for catalytic applications.
If the deposited films were thinner, the layer surrounding the particles could be
smoother as well. In such cases, the surface structure of the coated particles (which
was still completely closed) looked more golf ball-like, which might be of interest
for optical application.
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