Chemistry Reference
In-Depth Information
1.6
1.4
1.2
1.0
0.8
0.6
0.4
0.2
0.0
0
20
40
60
Process time (s)
80
100
120
FIGURE 8.65
Decreasing C
2
H
2
density vs. process time in an rf-plasma (10W, Ar and C
2
H
2
flow 2 sccm each).
1.4
5 W
10 W
15 W
20 W
1.2
1.0
0.8
0.6
0
200
400
600
800
Time (s)
FIGURE 8.66
Transmitted laser intensity vs. time, indicating dust particle formation in
Ar/C
2
H
2
rf-plasma. (From Do, H.T. et al.,
Contrib. Plasma Phys.
, 45, 378, 2005.)
to the dynamics of the carbon dust formation. The growth mechanism is influenced
by the combined action of various forces onto the particles (e.g., electrostatic, grav-
itational, neutral and ion drag, etc.) and the development of voids [431,442,443].
This behavior results in alternating dust particle-containing and dust particle-free
zones. The observed periodicity in the transmission signal can be explained by noting
