Chemistry Reference
In-Depth Information
TABLE 8.4
Applications of Plasma Surface Chemistry
Plasma Surface Chemistry
Target
Process
Material
Mass Transfer
Applications (Examples)
Sections
Solids
Etching
m
/
m
<
0
Microelectronics structuring, micromachining
8.2.1
Cleaning
m
/
m
∼
0
Industrial production
8.2.3.2
Decontamination
m
/
m
∼
0
Sterilization
8.2.2
Surface activation,
functionalization
m
/
m
∼
0
Wettability, printability, adhesion, settlement probability of cells
8.2.3
deposition
8.2.4
Organic films:
m
/
m
>
0
8.2.4.1
Carbon depositions
Diamond, DLC (a-C:H)
Hardness, wear resistance, frictional properties, scratch resistance,
corrosion protection, medical biocompatible coating, optical coating
Nanotubes, graphene
electronics, nanotechnology
Plasma polymers:
Corrosion protection, insulator in thin film capacitors, microelectronics
Hydrocarbons
mask material, scratch-resistant coatings, antisoiling and antibonding
Fluorocarbons
coating, optical coating
Siliconorganics
Composite films
Sensors, antibacterial coating
Inorganic films:
m
/
m
>
0
8.2.4.2
TiN, a-Si:H, TCO
Hardness, wear resistance, photovoltaic, decorative coatings
PEALD
Metal oxides
High
k
dielectrics, nanoelectronics
Liquids
8.3
TCO: transparent conducting oxides; PEALD: plasma-enhanced atomic layer deposition; DLC: diamond-like carbon.
