Chemistry Reference
In-Depth Information
8
Selected Applications
CONTENTS
8.1 VolumePlasmaChemistry ................................................... 286
8.1.1 Ozone Synthesis in Barrier Discharges: Basic Mechanism
and Discharge Operation Models ................................... 286
8.1.1.1 Chemistry of Ozone Formation in Gas Discharges ..... 288
8.1.1.2 Brief Review of the MD Models ......................... 290
8.1.1.3 Spatiotemporally Resolved Plasma Diagnostics
of the Microdischarges in Air and N
2
/O
2
Mixtures ..... 293
8.1.1.4 Concluding Remarks ..................................... 295
8.1.2 Plasma Treatment of Flue and Exhaust Gases...................... 296
8.1.2.1 Overview of Methods for Pollution Control............. 296
8.1.2.2 SelectedPlasmaTreatmentApplications................ 299
8.1.2.3 Concluding Remarks ..................................... 305
8.1.3 Plasma Chemistry of Excimer Light Sources ...................... 306
8.1.3.1 Main Processes of Excimer Formation
inRareGases.............................................. 307
8.1.3.2 Main Processes of Excimer Formation in Rare Gas
HalideMixtures........................................... 309
8.2 PlasmaSurfaceChemistry ................................................... 312
8.2.1 PlasmaEtching....................................................... 313
8.2.1.1 Plasma Etching, Micro- and Nanostructures ............ 313
8.2.1.2 Basic Mechanisms of Plasma Etching ................... 315
8.2.1.3 EtchChemistry............................................ 318
8.2.1.4 Reactors for Plasma Etching ............................. 320
8.2.1.5 Trench Etching ............................................ 322
8.2.1.6 Conclusions ............................................... 323
8.2.2 Biological Decontamination up to the Level
ofSterilization ....................................................... 323
8.2.2.1 Plasmas as New Prospects for Hygiene and
Life Science ............................................... 323
8.2.2.2 Some Basics of Biological Decontamination
andSterilization........................................... 324
8.2.2.3 MicrobicidalEffectsofPlasmas ......................... 326
8.2.2.4 ExamplesofPlasmaProcessesforSterilization......... 331
8.2.2.5 Outlook.................................................... 332
8.2.3 SurfaceModification ................................................ 332
8.2.3.1 Polymers .................................................. 334
8.2.3.2 Metals ..................................................... 340
8.2.3.3
Textiles .................................................... 343
285
