Chemistry Reference
In-Depth Information
0.5
F
+
0.1
S
+
0.04
S
2
0.2
SF
+
0.5
SF
2
15.6
SF
3
0.2
SF
4
6.4
SF
5
0.0
0
10
20
30
40
50
FIGURE 6.24
IED of positive ion of an rf discharge in SF
6
measured at the grounded
electrode. The triangles indicate the width of the plasma peak. (From Foest, R. et al.,
Phys.
Rev. E
, 54, 1876, 1996.)
O
-
-
O
2
Cl
-
5000
F
-
350
400
500
600
700
800
Electron energy [eV]
FIGURE 6.25
Energy distribution of negative ions measured at the grounded electrode of a
capacitively coupled rf discharge in O
2
.
V
rf
1600 V,
V
dc
(bias) at the powered electrode up to
650 V. (From Zeuner, M. et al.,
J. Appl. Phys.
, 79, 9379, 1996.)
