Chemistry Reference
In-Depth Information
6.3.4 Absorption Spectroscopy............................................ 216
6.3.4.1 General Considerations ................................... 216
6.3.4.2 Infrared Spectroscopy .................................... 219
6.3.5 Summary and Conclusion ........................................... 225
6.4 Laser Induced Fluorescence Spectroscopy .................................. 226
6.4.1 Principles of Laser-Induced Fluorescence.......................... 227
6.4.2 Instrumentation and Experimental Techniques..................... 229
6.4.3 Further Reading...................................................... 230
6.5 Mass Spectrometry ........................................................... 230
6.5.1 Mass Spectrometer................................................... 230
6.5.1.1 Ion Source ................................................. 232
6.5.1.2 Energy Analyzer .......................................... 234
6.5.1.3 Mass Analyzer ............................................ 234
6.5.1.4 IonDetection.............................................. 235
6.5.1.5 Coupling of the Mass Spectrometer with the
Plasma Source............................................. 235
6.5.2 IonAnalysis.......................................................... 235
6.5.2.1 SamplingOrifice.......................................... 236
6.5.2.2 TransferOptics............................................ 237
6.5.2.3 Coupling................................................... 237
6.5.2.4 GasPressure............................................... 237
6.5.2.5 Calibration ................................................ 238
6.5.2.6 Deduction of Data for Plasma Parameters ............... 238
6.5.2.7 DeterminationofIonDensity ............................ 238
6.5.2.8 Examples for Mass Spectrometric Measurements
inChemicallyActivePlasmas............................ 240
6.5.2.9 Conclusions ............................................... 240
6.5.3 Neutral Plasma Components ........................................ 241
6.5.3.1 Coupling................................................... 242
6.5.3.2 Electron Attachment Mass Spectrometry................ 242
6.5.3.3 Mass Spectrometric Investigation of Radicals........... 245
6.5.3.4 Threshold Ionization Mass Spectrometry................ 245
6.5.3.5 Ion Attachment Mass Spectrometry ..................... 247
6.5.3.6 Measuring Excess Energy ................................ 247
6.5.3.7 Measuring of Volatile Metal-Compounds ............... 248
6.5.3.8 Conclusions ............................................... 249
6.6 GasChromatography......................................................... 249
6.6.1 Gas Chromatographic Separation of Stable Compounds .......... 249
6.6.1.1 Principle................................................... 249
6.6.1.2 GC Equipment and Main Components .................. 250
6.6.1.3 BasicEquationofGasChromatography................. 252
6.6.2 Examples............................................................. 253
