Chemistry Reference
In-Depth Information
electron gas in the active reactor zone. Its simulation has to be solved simultaneously
with the complex system of master equations for heavy particles, including the
reaction products. The mass action law of the equilibrium chemistry is not applicable.
Generally, the solution of this complex problem is a challenge to computational
physics.
The realization and optimization of plasma chemical processes starts with the
selection of suitable plasma sources. Indispensable are a profound plasma diagnostics
and process control. This requires the knowledge of the discharge operation param-
eters (power input, pressure, flow, gas mixture, etc.) and its interconnection with
the most important plasma parameters (gas temperature, electron density, electron
energy, electron distribution, etc.) and the plasma chemical process itself (particle
densities, mass balance, surface properties, etc.).
To sum up, nonthermal plasma sources of technical relevance, important diag-
nostic methods, as well as the fundamentals of kinetic modeling of complex plasma
processes are presented in this topic.
