Chemistry Reference
In-Depth Information
Magnetron
R26 Waveguide
Short plunger
Couple pin
Lance
Process chamber
Hollow compound
(bottle)
Ignition-pin
Plasma
Bottom panel
(movable)
FIGURE 3.50
Scheme of source with moving plasma. (From Ehlbeck, J. et al.,
Surf. Coat.
Technol.,
174-175, 493, 2003.)
TABLE 3.14
Examples of Microwave Plasma Sources
Source
Pressure [Pa]
n
e
[
cm
−3
]
T
e
[
eV
]
Application
Closed structure
SLAN [81]
10
−
3
-10
5
10
11
5
PACVD
Open structure
Surfatron [86]
10
5
10
12
-10
15
5
Etching, coating
10-10
5
10
11
Planar Source [89]
2
Coating, cleaning
10
−
2
-1
10
12
ECR [97]
5
Coating
range of operating parameters as power input, sustaining frequency, and gas flow.
The scaling also to industrial dimensions is without essential problems [105,109].
The DBD operates in a filamentary mode and a diffuse mode existing under special
conditions is known as the atmospheric pressure glow discharge (APGD) [110].
Typical operation conditions of dielectric barrier discharges in air are presented
in Table 3.15.
