Chemistry Reference
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due to the radial ambipolar diffusion for the charged particles balance in the positive
column [3,50]
2.4
R
2
2.4
R
2
k B T e
e ·
ν ion (
E z ) =
ν diff =
D a ·
=
b + ·
.
(3.297)
Thereby, the ionization frequency is calculated by the linear approximation of the
electron impact ionization cross section above the threshold energy e
·
U ion accord-
ing to σ ion (
U
)
e
· (
U
U ion )
and the Maxwellian electron energy distribution
function,
2.4
R
2
U
k B T e
b +
a ·
ν ion =
p
· (
U
U ion ) ·
·
f
(
U
) ·
dU
=
V diff =
·
. (3.298)
U ion
The derived equation
k B ·
1 / 2
exp e
T e
U ion
k B ·
·
10 7
2
·
=
1.16
·
· (
c
·
p
·
R
)
(3.299)
e
·
U ion
T e
with c 2
combines the ratio between the mean electron energy
and the ionization threshold energy
= (
a
· (
U ion )
1
/
2
)/(
b + ·
p
)
where
c is a constant, depending on the kind of gas, p is the total pressure in Torr, and R is
the tube radius in cm, see Figure 3.36, [3].
The constant c amounts to He: 4
(
k B ·
T e /
e
·
U ion )
with the product
(
c
·
p
·
R
)
·
10 3 ,Ne:6
·
10 3 ,Ar:4
·
10 2 ,H 2 :1
·
10 2 ,
N 2 :4
·
10 2 .
10 -3
10 -2
10 -1
10 0
10 4
10 4
10 3
10 3
10 -3
10 -2
10 -1
10 0
c . p . R [Torr cm]
FIGURE 3.36 Universal graph from Equation (3.299) for the estimation of the electron
temperature in the positive column in dependence on the product ( c · p · R ) calculated from
the tube radius R as well as ionization potential U ion and the gas specific constant c .
 
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