Silicon/Electrolyte Interface - Electrochemistry of Silicon and Its Oxide - page 59

solutions because of strong polarization of the Si-SiF back bonds, thus facilitating the
attack by HF molecules, as originally proposed by Ubara et al. 820 This results in reactions
such as
which leaves a hydrogen-terminated surface. The formation of mono-, di-, and trihy-
drides, according to Ubara et al ., 820 can be described by the reactions illustrated in Fig.
2.12. The ideal (100) surface tends to be terminated by and the (111) surface by
SiH or due to the difference in the number of dangling bonds between the two
surfaces. The thermodymic, kinetic and structural characteristics for hydrogen interac-
tion with silicon surface has been reviewed by Oura et al . 1076
Trucks et al . 821 provided a kinetic explanation of hydrogen termination based on
the calculation of activation energies involved in breaking up the various silicon bonds
in the following reactions: