Anodic Behavior - Electrochemistry of Silicon and Its Oxide - page 193

5.8. TAFEL SLOPE AND DISTRIBUTION OF POTENTIAL

5.8.1. Tafel Slope

The slope of the plot of logarithm of current density versus potential, which char-
acteristically is linear for an activation-controlled reaction, is defined as the Tafel slope.
The Tafel slope determined in the exponential region of an

curve in HF solutions
is about 60 mV/decade for p types and heavily doped n types of silicon samples
as shown in Table 5.3. For lowly doped

i - V

n -Si, since illumination is required